As a kind of green energy, hydrogen is widely used in many fields. However, hydrogen is more explosive and flammable than traditional fossil fuels, which poses a challenge for safe production. Therefore, in the process of hydrogen use, accurate hydrogen concentration detection becomes crucial.
With the continuous improvement of the performance of semiconductor devices, the control requirements for impurities are more stringent. When manufacturing semiconductor devices, trace pollutants in the chemicals used in the cleaning and etching process of silicon wafers need to be routinely monitored, and trace pollution must be controlled at the lowest concentration as far as possible. Trace impurities in the chemicals used will affect the performance and yield of the final product. The International Semiconductor Equipment and Materials Industry Association (SEMI) has issued a standard on the performance indicators of high-purity reagents, which stipulates that the content of most impurity elements does not exceed 10 ppt, and the interference of plasma, solvent and matrix polyatomic ions during the test process will cause the background signal to be elevated, the mass spectrum to overlap. Some of the lighter elements are difficult to measure at trace levels, making analytical determination difficult.
The semiconductor hydrogen sensor realizes hydrogen detection by measuring the change of the resistivity of hydrogen to the sensitive material. As the concentration of hydrogen increases, a change in resistivity can be observed and the concentration of hydrogen can be calculated accordingly. This kind of sensor is increasingly popular in hydrogen sensors because of its fast response speed, wide operating temperature range, and ease of manufacture and integration.
In the field of energy, semiconductor hydrogen sensors have a wide range of applications. In fuel cell vehicles, for example, they are used to monitor the concentration of hydrogen inside the car to keep it safe. Sensors can also be used in hydrogen preparation, storage and delivery systems to ensure that the concentration of hydrogen in these systems is within a safe range.
In industrial production, hydrogen is commonly used to make a variety of chemicals, fuels and other energy products. At the same time, it will also involve the storage and use of hydrogen. Semiconductor hydrogen sensors can play an important role in these application scenarios, helping to improve production efficiency and safety.
In addition to industrial production and fuel cell vehicles, semiconductor hydrogen sensors can also be applied to leak detection in the natural gas industry. For example, in the process of natural gas storage and transportation, hydrogen leakage will bring unbearable harm to people and the environment. Using semiconductor hydrogen sensing technology, it is possible to monitor the hydrogen concentration in real time and quickly find the leak point, thereby minimizing risks and losses.
In general, semiconductor hydrogen sensors are widely used in the field of hydrogen, bringing greater safety and efficiency to hydrogen related applications. It is worth noting that with the advancement of technology, the performance of semiconductor hydrogen sensors will continue to improve, and their application fields will be further expanded, making greater contributions to the development of sustainable energy.
